Vacuum device, high voltage applying unit used for it

真空装置及び真空装置に用いられる高電圧印加ユニット

Abstract

【課題】電圧印加ユニットの耐電圧性を維持しつつ、軸方向及び径方向ともに小型化することである。 【解決手段】真空容器2と、その真空容器2内に設けられる電極8と、前記真空容器2の外壁21に設けられ、外部から前記電極8に電圧を印加するための高電圧印加ユニット4と、を備え、前記高電圧印加ユニット4が、一端が大気側に、他端が真空側に設けられて、当該他端が前記電極に電気的に接触して電圧を印加する高電圧印加端子41と、前記高電圧印加端子41が貫通して設けられ、一端が大気側に、他端が真空側に設けられる絶縁性を有する絶縁体42と、前記絶縁体42が貫通して設けられ、前記真空容器の外壁21に気密に取り付けられるフランジ部43と、を備え、前記フランジ部43から大気側及び真空側に突出した前記絶縁体42の外側周面42aを非接触状態にして、さらに、前記絶縁体42の外側周面42aに凹凸部を設けていることを特徴とする。 【選択図】図3
PROBLEM TO BE SOLVED: To miniaturize a high voltage applying unit in its axial direction as well as its diameter direction while maintaining withstand voltage properties of the unit. SOLUTION: This vacuum device is equipped with a vacuum vessel 2, an electrode 8 provided in the vacuum vessel 2, and the high voltage applying unit 4 provided on the outer wall 21 of the vacuum vessel 2 to apply a voltage to the electrode 8 from the outside. The high voltage applying unit 4 is equipped with a high voltage applying terminal 41 one end of which is provided on the atmosphere side, the other end of which is provided on the vacuum side, and the other end of which electrically makes contact with the electrode to apply the voltage, an insulator 42 having insulating properties through which the high voltage applying terminal passes, one end of which is provided on the atmosphere side, and the other end of which is provided on the vacuum side, and a flange part 43 through which the insulator 42 passes, and which is air-tightly attached to the outer wall 21 of the vacuum vessel. The outside periphery 42a of the insulator 42 projecting to the atmosphere side and the vacuum side from the flange part 43 is brought into a non-contact state, and also recessed and projecting parts are provided on the outside periphery 42a of the insulator 42. COPYRIGHT: (C)2008,JPO&INPIT

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